IXION 193 SLM laser system

IXION 193 SLM laser system

Single Frequency DPSS laser at 193.368 nm. The new standard for semiconductor metrology and more.

The IXION 193 SLM is a single frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. The spectral bandwidth is near its theoretical Fourier limit.

 

The center wavelength of the system is customizable in a range between 185 and 194 nm and can be configured for a fixed wavelength at the time of order.

 

As an additional option, a high precision spectrometer with an absolute spectral accuracy of 0.001 nm can be integrated into the system. This enables maximum precision for the control of the spectral tuning of the laser.

 

APPLICATIONS IXION 193 SLM

  • 193 nm metrology
  • Spectrometer calibration
  • Interferometry
  • Injection seeding of Excimer lasers

IXION 193 SLM

Wavelength 193.368 nm
Average power 10 mW
Pulse duration typ 8-12 ns
Energy per pulse 1.6 µJ
Repetition rate 1-15 kHz
Beam quality M² < 1.6
Spectral bandwith < 80 MHz
Spectral tunability > 10 pm
Coherence length > 2 m
Pulse to pulse stab. σ < 2.5 %

DOWNLOADS IXION 193 SLM

IXION 193 SLM datasheet

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