Single Frequency DPSS laser at 193.368 nm. The new standard for semiconductor metrology and more.
IXION 193 SLM laser system
The IXION 193 SLM is a single frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. The spectral bandwidth is near its theoretical Fourier limit.
The center wavelength of the system is customizable in a range between 185 and 194 nm and can be configured for a fixed wavelength at the time of order.
As an additional option, a high precision spectrometer with an absolute spectral accuracy of 0.001 nm can be integrated into the system. This enables maximum precision for the control of the spectral tuning of the laser.
APPLICATIONS IXION 193 SLM
- 193 nm metrology
- Spectrometer calibration
- Interferometry
- Injection seeding of Excimer lasers
IXION 193 SLM
| Wavelength | 193.368 nm |
| Average power | 10 mW |
| Pulse duration | typ 8-12 ns |
| Energy per pulse | 1.6 µJ |
| Repetition rate | 1-15 kHz |
| Beam quality | M² < 1.6 |
| Spectral bandwith | < 80 MHz |
| Spectral tunability | > 10 pm |
| Coherence length | > 2 m |
| Pulse to pulse stab. | σ < 2.5 % |
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