EXCITE Series laser system

The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit.

The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design.

APPLICATIONS EXCITE Series

Wafer inspection
Photoluminescence
Interferometry
Raman spectroscopy
Holography
Spectrometer calibration
Metrology
Direct interferometric lithography

EXCITE 266

Wavelength	266 nm
Spectral bandwidth	< 60 MHz
Coherence length	> 2.5 m
Average power	> 150 mW
Pulse duration	10-15 ns
Energy per pulse	> 12.5 µJ
Repetition rate	1 – 30 kHz
M²	< 1.7
Pulse-to-pulse stab.	σ < 1.5%

EXCITE 355

Wavelength	355 nm
Spectral bandwidth	< 50 MHz
Coherence length	> 3 m
Average power	> 500 mW
Pulse duration	14-18 ns
Energy per pulse	> 40 µJ
Repetition rate	1 – 30 kHz
M²	< 1.3
Pulse-to-pulse stab.	σ < 1.0%

EXCITE 532

Wavelength	532 nm
Average power	2.5 W
Pulse duration	15-20 ns
Energy per pulse	160 µJ
Repetition rate	1 – 30 kHz
M²	< 1.2
Spectral bandwidth	< 50 MHz
Coherence length	> 3 m
Pulse-to-pulse stab.	σ < 0.8 %

EXCITE 1064

Wavelength	1064 nm
Average power	6 W
Pulse duration	20-30 ns
Energy per pulse	400 µJ
Repetition rate	1 – 30 kHz
M²	< 1.2
Spectral bandwidth	< 30 MHz
Coherence length	> 5 m
Pulse-to-pulse stab.	σ < 0.3 %