EXCITE Series laser system

EXCITE Series laser system

New generation of Single Frequency DPSS laser, available for most Nd harmonics (1064, 532, 355, 266 nm). Smaller footprint than SLM series.

The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit.

 

The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design.

 

APPLICATIONS EXCITE Series

  • Wafer inspection
  • Photoluminescence
  • Interferometry
  • Raman spectroscopy
  • Holography
  • Spectrometer calibration
  • Metrology
  • Direct interferometric lithography

 

EXCITE 266

Wavelength 266 nm
Spectral bandwidth < 60 MHz
Coherence length > 2.5 m
Average power > 150 mW
Pulse duration 10-15 ns
Energy per pulse > 12.5 µJ
Repetition rate 1 – 30 kHz
< 1.7
Pulse-to-pulse stab. σ < 1.5%

 

EXCITE 355

Wavelength 355 nm
Spectral bandwidth < 50 MHz
Coherence length > 3 m
Average power > 500 mW
Pulse duration 14-18 ns
Energy per pulse > 40 µJ
Repetition rate 1 – 30 kHz
< 1.3
Pulse-to-pulse stab. σ < 1.0%

 

EXCITE 532

Wavelength 532 nm
Average power 2.5 W
Pulse duration 15-20 ns
Energy per pulse 160 µJ
Repetition rate 1 – 30 kHz
< 1.2
Spectral bandwidth < 50 MHz
Coherence length > 3 m
Pulse-to-pulse stab. σ < 0.8 %

 

EXCITE 1064

Wavelength 1064 nm
Average power 6 W
Pulse duration 20-30 ns
Energy per pulse 400 µJ
Repetition rate 1 – 30 kHz
< 1.2
Spectral bandwidth < 30 MHz
Coherence length > 5 m
Pulse-to-pulse stab. σ < 0.3 %

 

DOWNLOADS EXCITE Series

EXCITE Datasheet

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