EXCITE Series laser system

EXCITE Series laser system

New generation of Single Frequency DPSS laser, available for most Nd harmonics (1064, 532, 355, 266 nm). Smaller footprint than SLM series.

The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit.

 

The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design.

 

APPLICATIONS EXCITE Series

  • Wafer inspection
  • Photoluminescence
  • Interferometry
  • Raman spectroscopy
  • Holography
  • Spectrometer calibration
  • Metrology
  • Direct interferometric lithography

 

EXCITE 266

Wavelength266 nm
Spectral bandwidth< 60 MHz
Coherence length> 2.5 m
Average power> 150 mW
Pulse duration10-15 ns
Energy per pulse> 12.5 µJ
Repetition rate1 – 30 kHz
< 1.7
Pulse-to-pulse stab.σ < 1.5%

 

EXCITE 355

Wavelength355 nm
Spectral bandwidth< 50 MHz
Coherence length> 3 m
Average power> 500 mW
Pulse duration14-18 ns
Energy per pulse> 40 µJ
Repetition rate1 – 30 kHz
< 1.3
Pulse-to-pulse stab.σ < 1.0%

 

EXCITE 532

Wavelength532 nm
Average power2.5 W
Pulse duration15-20 ns
Energy per pulse160 µJ
Repetition rate1 – 30 kHz
< 1.2
Spectral bandwidth< 50 MHz
Coherence length> 3 m
Pulse-to-pulse stab.σ < 0.8 %

 

EXCITE 1064

Wavelength1064 nm
Average power6 W
Pulse duration20-30 ns
Energy per pulse400 µJ
Repetition rate1 – 30 kHz
< 1.2
Spectral bandwidth< 30 MHz
Coherence length> 5 m
Pulse-to-pulse stab.σ < 0.3 %

 

DOWNLOADS EXCITE Series

EXCITE Datasheet

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